Simple method for measuring the porosity, thickness and refractive index of porous silicon, based on the Fabry-Pérot interference spectrum

Authors

  • Tiago Franca Paes Federal University of Bahia image/svg+xml
  • Antonio Fernando Beloto National Institute for Space Research image/svg+xml
  • Ellen Christine de Souza Galvão Instituto de Ciência e Tecnologia (ICT), UNIFESP
  • Luiz Angelo Berni National Institute for Space Research image/svg+xml

DOI:

https://doi.org/10.17563/rbav.v35i3.1044

Keywords:

porous silicon, porosity, thickness, refraction index.

Abstract

This article presents a technique to estimate, nondestructively, the thickness, porosity and refractive index of porous silicon samples. The technique is based on the Fabry-Pérot interference spectrum analyzed by the Reflectometric Interference Fourier Transform Spectroscopy (RIFTS). The technique, also known as SLIM - Spectroscopic Liquid Infiltration Method (Segal 2007) takes into account the infiltration of a liquid with known refractive index inside the pores of the samples.

Author Biographies

  • Tiago Franca Paes, Federal University of Bahia
    Professor adjunto do Departamento de Física Geral do Instituto de Física
  • Antonio Fernando Beloto, National Institute for Space Research
    Pesquisador do Grupo de Dispositivos Fotovoltaicos do Laboratório Associado de Sensores e Materiais
  • Ellen Christine de Souza Galvão, Instituto de Ciência e Tecnologia (ICT), UNIFESP
    Bolsista estágio do Grupo de Dispositivos Fotovoltaicos do Laboratório Associado de Sensores e Materiais
  • Luiz Angelo Berni, National Institute for Space Research
    Pesquisador do Grupo de Dispositivos Fotovoltaicos do Laboratório Associado de Sensores e Materiais

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Published

2017-02-21

Issue

Vol. 35 No. 3 (2016)

Section

Superfícies e Filmes Finos