Design, fabrication and characterization of a low-cost home-built DC sputter system

Authors

  • Giuseppe Antonio Cirino Universidade Federal de São Carlos – Centro de Ciências Exatas e de Tecnologia – Departamento de Engenharia Elétrica – São Carlos (SP), Brazil. , Universidade Federal de São Carlos – Centro de Ciências Exatas e de Tecnologia – Departamento de Engenharia Elétrica – São Carlos (SP), Brasil. https://orcid.org/0000-0003-0730-5299 (unauthenticated)
  • Henrique Moreira Pinto Universidade Federal de São Carlos – Centro de Ciências Exatas e de Tecnologia – Departamento de Engenharia Elétrica – São Carlos (SP), Brazil. , Universidade Federal de São Carlos – Centro de Ciências Exatas e de Tecnologia – Departamento de Engenharia Elétrica – São Carlos (SP), Brazil. https://orcid.org/0009-0006-6069-5782 (unauthenticated)

DOI:

https://doi.org/10.17563/rbav.v42i1.1239

Abstract

This work reports the performance characterization of a low-cost home-built planar direct current (DC) sputtering system. This characterization was carried out concerning the vacuum system performance, the DC power supply output regulation and ripple level, and the discharge electric breakdown for argon at low pressure. As a result, the proposed system can be used for the deposition of several metal thin films such as copper, silver and gold, on top of a substrate with up to 3-inch in diameter.

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Published

2023-10-17

Issue

Vol. 42 No. 1 (2023)

Section

Original Paper

License

Copyright (c) 2023 Giuseppe Antonio Cirino, Henrique Moreira Pinto

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.