DIAMOND-LIKE CARBON FILMS: IMPROVED PROPERTIES AND NEW APPLICATIONS
DOI:
https://doi.org/10.17563/rbav.v44i1.1278Keywords:
DLC films, Growth process, PECVD techniques, Properties, ApplicationsAbstract
Since 1972, diamond-like carbon (DLC) thin films have attracted great scientific and technological interest due to their unique properties, notably the high adhesion on metallic and non-metallic substrates, allowing them to expand their applications to areas such as space and biological. DLC films can be obtained by various techniques, such as physical vapor deposition, ion beam-assisted deposition, and plasma enhancement chemical vapor deposition (PECVD). This review focused on the studies of the Diamond and Related Materials Research Group, which compared various techniques and selected direct current (DC) pulsed PECVD for its low cost and versatility. The studies focused on determining the coating parameters such as adhesion, hardness, friction, wear resistance, biocompatibility, structural stresses, and scalability. Next, the group improved the DC pulsed PECVD with the introduction of the concept of ion and electron confinement. This innovative method has made it possible to obtain better plasma density at low pressures, improving the characteristics of the film. The non-collision growth process resulted in a harder DLC, with better adhesion, less wear, and maintained biocompatibility. The system has proven to be effective, cost-effective, easy to use, and scalability even for complex geometries
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Copyright (c) 2025 Luis Francisco Bonetti, Fernanda Roberta Marciano, Gabriely Gonçalves Lima, Renan Matos Monção, Luz Stefany Murcia Correa, Elver Juan de Dios Mitma Pillaca, Evaldo José Corat, Vladimir Jesus Trava-Airoldi
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