CONSTRUCTION OF AN EVAPORATION SYSTEM FOR FILM DEPOSITION VIA RESISTIVE AND ELECTRON BEAM SOURCES

Autores

  • F. S. De Vicente
  • E. A. A. Rubo
  • M. Siu Li

DOI:

https://doi.org/10.17563/rbav.v23i1.147

Resumo

An evaporation system with both resistive and electron beam sources and also specific accessories for optimized film deposition in vacuum has been designed and built. The aim for the construction of the apparatus was to produce films with thickness from few hundreds of nanometers up to tenths of microns, starting from materials among a wide range of evaporation temperatures. This system presents low cost as also easy maintenance compared with commercial systems for films deposition.

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Publicado

2008-03-09

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