CHEMICAL SPECIES GENERATION IN RF EXCITED LOW PRESSURE DISCHARGES IN C<sub>2</sub>H<sub>2</sub>-N<sub>2</sub> AND C<sub>2</sub>H<sub>2</sub>-Ar MIXTURES PROBED BY MASS SPECTROMETRY AND ACTINOMETRIC OPTICAL EMISSION SPECTROSCOPY
This paper presents the results from Actinometric Optical Emission Spectroscopy and Mass Spectrometry of RF excited plasmas in low pressure C2H2-N2 and C2H2-Ar atmospheres. The pressure and RF power trends for CH species obtained for the same plasma parameters for both techniques are in close agreement. This shows the effectiveness of Actinometry in plasma monitoring in spite of its inherent limitation as plasma diagnostic tool.
