Atomic force microscope (AFM) was used to investigate the surface morphology of Au sputtered onto cleaved mica in ordinary deposition as used to SEM analysis. The data have as basis the variation of the surface morphology by the film formation and the RMS roughness assessment. The results indicate a relative homogeneity in the deposited film with nuclei formation of dimensions around 40 nm height by 30 nm diameters. The overall area, when measured by AFM way, is found to be approximately 5.5 times large due to deposition.
