New and efficient monitoring strategies are necessary to obtain interesting answers of the plasma. In order to comprehend the dynamic involved in such an ambient when interactions occur between solids and free particles, it has been utilized the plasma diagnostic by Optical Emission Spectroscopy – OES. Due to the large publication of studies related to plasma combinations of N2, H2 and Ar, the atmosphere of N2 – Ar – H2 plasma was analysed by OES technique. The species N2+, N2, and Hα were identified and monitored observing the relative intensities increasing of those three species versus flow of H2 gas; it has been observed a non-linear comportment.
