QUANTITATIVE GAS ANALYSIS IN VACUUM SYSTEMS

Autores

  • R. Dobrozemsky

DOI:

https://doi.org/10.17563/rbav.v5i1-2.882

Resumo

For the determination of small gasquantities, gases are admittedto a vacuum system under dynamic pumping conditions and a great number of mass spectra are recorder together with the total-pressure gauge readings. A special calibration procedure has been developed, based on admittance of a calibrated gas-burst into the analysis os a N2-CO-CO2 mixtures is given, showing that even complex gas-mixture can be identified and analysed with errors of less than 2%.

Downloads

Edição

Seção

Artigos