REAL-TIME, IN-SITU MICROSCOPIC OBSERVATION OF SILICON ETCHING IN KOH

Autores

  • A. C. Gracias
  • A. N. Rios
  • I. A. Maia
  • J. R. Senna

DOI:

https://doi.org/10.17563/rbav.v19i1.217

Resumo

We have built a reactor that allows real-time, in-situ observation of the silicon surface during etching in liquids. We diseuss the issues in etching which it can help to elucidate, and exemplify them by showing a sequence of images of hydrogell bubble formation, growth and motion of the surface of silicon being etched in a KOH solution. We have observed tracks left on the surface by the bubbles. Subsequent measurement witlh a profilometer show that these tracks are made of crates, which implies that pinned bubbles initiate craters under themselvels. The steps in growth of the cavities are discussed.

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Publicado

2008-05-09

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