HIGH VACUUM PUMPS AND SELECTED EXAMPLES FOR THEIR APPLICATIONS

Autores

  • G. Schäfer

DOI:

https://doi.org/10.17563/rbav.v8i1-2.784

Resumo

A survey is given on the gas transfer high vacuum pumps (diffusion and turbomolecular pumps) and entrapment pumps (cryopumps and getter pumps) used in industry and research, and on some important applications in the high vacuum range.

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